Igikoresho cyo gucukura plasma cya PJ-PSD
Ibisobanuro by'ingenzi
Ibiranga:
1) Umuvuduko wo gukora nitriding wihuta, uruziga rwo gukora nitriding rushobora kugabanywa uko bikwiye, kandi igihe cyo gukora nitriding cya iyoni gishobora kugabanywa kugeza kuri 1/3-2/3 by'igihe cyo gukora nitriding ya gaze.
2) Uburemere bw'urukiramende rwa nitriding ni buto, kandi urukiramende rw'umweru rwakozwe ku buso bwa nitriding ya plasma ni ruto cyane, cyangwa nta na rumwe. Byongeye kandi, ubwihindurize buterwa n'urukiramende rwa nitriding ni buto, bukwiriye cyane cyane ibice bifite imiterere igoye.
3) Ingufu na ammonia bishobora kuzigamwa. Ingufu z'amashanyarazi zikoreshwa ni 1/2-1/5 by'umwuka ukoreshwa na nitride naho ammonia ikoreshwa ni 1/5-1/20 by'umwuka ukoreshwa na nitride.
4) Biroroshye kubona ko icyuma gitera nitride mu gace runaka, igihe cyose igice kidashaka ko icyuma gitera nitride kidatanga urumuri, igice kidatera nitride cyoroshye kurinda, kandi urumuri rushobora kurindwa hakoreshejwe uburyo bwo gukingira n'icyuma gikingira.
5) Itera rya Ion rishobora gusukura ubuso no gukuraho firime igabanya ubushyuhe mu buryo bwikora. Icyuma kidashonga n'icyuma kidashyuha bishobora gukurwamo nitride bitabanje gukuraho firime igabanya ubushyuhe.
6) Imiterere y'urwego rw'inyongera, ubugari bw'urwego rw'inyongera n'imiterere yarwo bishobora kugenzurwa.
7) Ubushyuhe bwo kuvurwa ni bugari, kandi ubugari runaka bw'urwego rwa nitriding bushobora kuboneka ndetse no munsi ya 350 C.
8) Imiterere y'akazi yararushijeho kuba myiza. Uburyo bwo kuvura nta mwanda uhumanya ikirere n'amazi akoreshwa mu gukwirakwiza nitride mu maraso bukorwa ku muvuduko muto cyane ukoresheje umwuka muke cyane. Isoko ya gazi ni azote, hydrogen na ammonia, kandi muri rusange nta bintu byangiza bivamo.
9) Ishobora gukoreshwa ku bikoresho byose, harimo icyuma kidashyuha, icyuma kidashyuha gifite ubushyuhe bwinshi buterwa na nitride, icyuma cy'ibikoresho n'ibice by'ibikoresho bifite ubushyuhe buke buterwa na nitride, mu gihe gukoresha nitride mu bushyuhe buke bigoranye cyane gukoresha nitride mu mwuka.
| Icyitegererezo | Ingano y'Ubushyuhe ya MaxAverage | Ubuso ntarengwa bwo kuvurwa | Ingano y'akazi ikora neza (mm) | Umuvuduko w'amashanyarazi usohoka | Ubushyuhe bupimwe | Igitutu cy'ikirenga | Igipimo cyo Kuzamuka k'Umuvuduko |
| PJ-PSD 25 | 50A | 25000cm2 | 640×1000 | 0~1000V | 650℃ | ≤6.7Pa | ≤0.13Pa/umunota |
| PJ-PSD 37 | 75A | 37500cm2 | 900×1100 | 0~1000V | 650℃ | ≤6.7Pa | ≤0.13Pa/umunota |
| PJ-PSD 50 | 100A | 50000cm2 | 1200×1200 | 0~1000V | 650℃ | ≤6.7Pa | ≤0.13Pa/umunota |
| PJ-PSD 75 | 150A | 75000cm2 | 1500×1500 | 0~1000V | 650℃ | ≤6.7Pa | ≤0.13Pa/umunota |
| PJ-PSD100 | 200A | 100000cm2 | 1640×1600 | 0~1000V | 650℃ | ≤6.7Pa | ≤0.13Pa/umunota |


